Wide-Area 3D Measurement System

VR series

This model has been discontinued.
Compliance with the certification standard is ensured as of the time of shipment from our company.

Recommended Replaceable Products: 3D Optical Profilometer Controller - VR-6000

Wide-Area 3D Measurement System Controller VR-3000K

VR-3000K - Wide-Area 3D Measurement System Controller

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

Data Sheet (PDF)

  • CE Marking
  • CSA

Specifications

Model

VR-3000K

Type

Controller

Head

VR-3100,VR-3050

Field-of-view

Wide-field mode

Magnification on a
15" monitor 12x

Horizontal

24 mm

Vertical

18 mm

Magnification on a
15" monitor 25x

Horizontal

24 mm

Vertical

Magnification on a
15" monitor 38x

Horizontal

Vertical

Magnification on a
15" monitor 50x

Horizontal

Vertical

High magnification mode

Magnification on a
15" monitor 40x

Horizontal

Vertical

Magnification on a
15" monitor 80x

Horizontal

Vertical

Magnification on a
15" monitor 120x

Horizontal

Vertical

Magnification on a
15" monitor 160x

Horizontal

Vertical

Zoom

1 to 4x

Measurable height

Wide-field mode:10 mm (±5 mm) High magnification mode:1 mm(±0.5 mm)*1

Repeatability(σ)

Height measurement

0.5 µm*2

Width measurement

Wide-field mode: 1 µm, High magnification mode: 0.5 µm*2

Measurement
accuracy

Height measurement

±3 µm*2

Width measurement

Wide-field mode: ±5 µm, High magnification mode: ±2 µm*2

Stitching function

Full automatic (XY stage automatic control + auto focus) measurement*3
Auto adjustment, Auto template analysis*3
Manual (XY, Z)*3

Stage

XY stroke

184 × 88 mm (motorized)
70 mm *4 (200 mm *5) (manual)

Z stroke

90 mm(electric)

Rotation

±90°

Tilt

Over ±30°

Working distance

75 mm

Image receiving element

4 megapixel monochrome CMOS

Transmitter lens

Double telecentric lens x2

Receiver lens

Double telecentric lens

Light sources

Observation light source

LED ring light (red, green, blue)(VR-3100),LED ring light (white)(VR-3050)

Measurement light source

White LED

Image size

1024 x 768 pix, 2048 x 1536 pix

Data processing

Dedicated PC specified by KEYENCE (OS: Windows 7)*6

Rating

Power voltage

100 to 240 VAC, 50/60 Hz

Power consumption

150 VA

Environmental resistance

Ambient temperature

+15 to +30 °C

Relative humidity

35 to 80 % RH (No condensation)

Weight

3.8 kg

*1 Low range ±5 mm 0.20" and high range ±0.5 mm ±0.02" around the focal point position.
*2 Value obtained using KEYENCE's specified standard gauge with measurement in KEYENCE's specified measurement mode (ambient temperature: 23±1°C).
*3 The stitching module (VR-H2J) is required.
*4 The VR-3050 requires the XYθ stage (OP-87715).
*5 When the OP-87717 manual slider for stitching used.
*6 Windows 7 Professional and Ultimate.

Data Sheet (PDF) Other Models