Specs : Confocal Displacement Sensor - CL-3000 series

Optical Units and Sensor Heads - Quad type (Export Control Product)

Model			CL-L007G^*1	CL-L015G^*1	CL-L030G^*1	CL-L070G^*1	CL-L150G^*1
Image
Type			Optical unit
Head			CL-L007 ^*1	CL-L015 ^*1	CL-L030 ^*1	CL-L070 ^*1	CL-L150 ^*1
Reference distance			7 mm	15 mm	30 mm	70 mm	150 mm
Reference measurement range	Measurement range		± 1.5 mm	± 1.3 mm	± 3.7 mm	± 10 mm	± 35 mm
	Linearity		± 1.95 µm ^*2	± 0.36 µm ^*2	± 0.81 µm^*2	± 2.0 µm^*2	± 5.5 µm^*2
High precision measurement range	Measurement range		± 0.5 mm		± 1.0 mm	± 3.0 mm	± 15 mm
	Linearity		± 0.78 µm ^*2	± 0.28 µm ^*2	± 0.59 µm ^*2	± 1.9 µm ^*2	± 4.5 µm ^*2
Resolution			0.015 µm^*3	0.003 µm^*3	0.015 µm^*3	0.025 µm^*3	0.1 µm^*3
Spot diameter			ø 750 µm	ø 300 µm	ø 500 µm	ø 600 µm	ø 1000 µm
Laser class	Optical unit		Class 1
Sampling cycle			100/200/500/1000 µs (Adjustable 4-stage)
Environmental resistance	Enclosure rating	Head	IP67 (IEC60529)
	Ambient light		Target surface illuminance 30,000 lux (Incandescent lamp)
	Ambient temperature		0 to 50°C
	Relative humidity		85% RH or less (no condensation)
	Vibration resistance	Head	10 to 57 Hz, double amplitude 1.5 mm; 2 hours each for X, Y, and Z axes
		Optical unit	10 to 57 Hz, double amplitude 0.3 mm; 2 hours each for X, Y, and Z axes
	Shock resistance		15G 6 ms
Temperature characteristic	Head		0.005% of F.S. / °C
	Optical unit		0.015% of F.S. / °C
Material	Head		SUS	Front: SUS Rear: Aluminium
	Optical unit		Polycarbonate
Weight	Head		Approx. 140 g	Approx. 180 g	Approx. 200 g	Approx. 280 g	Approx. 380 g
	Optical unit		Approx. 1600 g
^1 Sensor head and optical unit are a matched pair. Not cross compatible. ^2 Value measured in displacement mode with KEYENCE reference workpiece (mirrored surface). ^*3 Value measured using 16,384 average cycles with KEYENCE reference workpiece (mirrored surface).

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Optical Units and Sensor Heads - Focused spot type (Export Control Product)

Model			CL-P007G^*1	CL-P015G^*1	CL-P030G^*1	CL-P070G^*1	CL-P150G^*1
Image
Type			Optical unit
Head			CL-P007 ^*1	CL-P015 ^*1	CL-P030 ^*1	CL-P070 ^*1	CL-P150 ^*1
Reference distance			7 mm	15 mm	30 mm	70 mm	150 mm
Reference measurement range	Measurement range		± 1.5 mm	± 1.3 mm	± 3.7 mm	± 10 mm	± 35 mm
	Linearity		± 0.83 µm ^*2	± 0.36 µm ^*2	± 0.81 µm ^*2	± 2.0 µm ^*2	± 5.5 µm ^*2
High precision measurement range	Measurement range		± 0.5 mm		± 1.0 mm	± 3.0 mm	± 15 mm
	Linearity		± 0.43 µm ^*2	± 0.28 µm ^*2	± 0.59 µm ^*2	± 1.9 µm ^*2	± 4.5 µm ^*2
Resolution			0.015 µm	0.003 µm	0.015 µm	0.025 µm	0.1 µm
Spot diameter			ø 50 µm	ø 25 µm	ø 38 µm	ø 50 µm	ø 75 µm
Laser class	Optical unit		Class 1
Sampling cycle			100/200/500/1000 µs (Adjustable 4-stage)
Environmental resistance	Enclosure rating	Head	IP67 (IEC60529)
	Ambient light		Target surface illuminance 30,000 lux (Incandescent lamp)
	Ambient temperature		0 to 50°C
	Relative humidity		85% RH or less (no condensation)
	Vibration resistance	Head	10 to 57 Hz, double amplitude 1.5 mm; 2 hours each for X, Y, and Z axes
		Optical unit	10 to 57 Hz, double amplitude 0.3 mm; 2 hours each for X, Y, and Z axes
	Shock resistance		15G 6 ms
Temperature characteristic	Head		0.005% of F.S. / °C
	Optical unit		0.015% of F.S. / °C
Material	Head		SUS	Front: SUS Rear: Aluminium
	Optical unit		Polycarbonate
Weight	Head		Approx. 140 g	Approx. 180 g	Approx. 200 g	Approx. 280 g	Approx. 380 g
	Optical unit		Approx. 1600 g
^1 Sensor head and optical unit are a matched pair. Not cross compatible. ^2 Value measured in displacement mode with KEYENCE reference workpiece (mirrored surface).

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Optical Units and Sensor Heads - Quad type

Model			CL-L007N^*1	CL-L015N^*1	CL-L030N^*1	CL-L070N^*1	CL-L150N^*1
Image
Type			Optical unit
Head			CL-L007 ^*1	CL-L015 ^*1	CL-L030 ^*1	CL-L070 ^*1	CL-L150 ^*1
Reference distance			7 mm	15 mm	30 mm	70 mm	150 mm
Reference measurement range	Measurement range		± 1.5 mm	± 1.3 mm	± 3.7 mm	± 10 mm	± 35 mm
	Linearity		± 2.1 µm ^*2	± 0.49 µm ^*2	± 0.94 µm^*2	± 2.2 µm^*2	± 5.65 µm^*2
High precision measurement range	Measurement range		± 0.5 mm		± 1.0 mm	± 3.0 mm	± 15 mm
	Linearity		± 0.91 µm ^*2	± 0.41 µm ^*2	± 0.72 µm ^*2	± 2.0 µm ^*2	± 4.65 µm ^*2
Resolution			0.25 µm^*3
Spot diameter			ø 750 µm	ø 300 µm	ø 500 µm	ø 600 µm	ø 1000 µm
Laser class	Optical unit		Class 1
Sampling cycle			100/200/500/1000 µs (Adjustable 4-stage)
Environmental resistance	Enclosure rating	Head	IP67 (IEC60529)
	Ambient light		Target surface illuminance 30,000 lux (Incandescent lamp)
	Ambient temperature		0 to 50°C
	Relative humidity		85% RH or less (no condensation)
	Vibration resistance	Head	10 to 57 Hz, double amplitude 1.5 mm; 2 hours each for X, Y, and Z axes
		Optical unit	10 to 57 Hz, double amplitude 0.3 mm; 2 hours each for X, Y, and Z axes
	Shock resistance		15G 6 ms
Temperature characteristic	Head		0.005% of F.S. / °C
	Optical unit		0.015% of F.S. / °C
Material	Head		SUS	Front: SUS Rear: Aluminium
	Optical unit		Polycarbonate
Weight	Head		Approx. 140 g	Approx. 180 g	Approx. 200 g	Approx. 280 g	Approx. 380 g
	Optical unit		Approx. 1600 g
^1 Sensor head and optical unit are a matched pair. Not cross compatible. ^2 Value measured in displacement mode with KEYENCE reference workpiece (mirrored surface). ^*3 Value measured using 16,384 average cycles with KEYENCE reference workpiece (mirrored surface).

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Optical Units and Sensor Heads - Focused spot type

Model			CL-P007N^*1	CL-P015N^*1	CL-P030N^*1	CL-P070N^*1	CL-P150N^*1
Image
Type			Optical unit
Head			CL-P007 ^*1	CL-P015 ^*1	CL-P030 ^*1	CL-P070 ^*1	CL-P150 ^*1
Reference distance			7 mm	15 mm	30 mm	70 mm	150 mm
Reference measurement range	Measurement range		± 1.5 mm	± 1.3 mm	± 3.7 mm	± 10 mm	± 35 mm
	Linearity		± 0.96 µm^*2	± 0.49 µm^*2	± 0.94 µm^*2	± 2.2 µm^*2	± 5.65 µm ^*2
High precision measurement range	Measurement range		± 0.5 mm		± 1.0 mm	± 3.0 mm	± 15 mm
	Linearity		± 0.55 µm ^*2	± 0.41 µm ^*2	± 0.72 µm ^*2	± 2.0 µm ^*2	± 4.65 µm ^*2
Resolution			0.25 µm
Spot diameter			ø 50 µm	ø 25 µm	ø 38 µm	ø 50 µm	ø 75 µm
Laser class	Optical unit		Class 1
Sampling cycle			100/200/500/1000 µs (Adjustable 4-stage)
Environmental resistance	Enclosure rating	Head	IP67 (IEC60529)
	Ambient light		Target surface illuminance 30,000 lux (Incandescent lamp)
	Ambient temperature		0 to 50°C
	Relative humidity		85% RH or less (no condensation)
	Vibration resistance	Head	10 to 57 Hz, double amplitude 1.5 mm; 2 hours each for X, Y, and Z axes
		Optical unit	10 to 57 Hz, double amplitude 0.3 mm; 2 hours each for X, Y, and Z axes
	Shock resistance		15G 6 ms
Temperature characteristic	Head		0.005% of F.S. / °C
	Optical unit		0.015% of F.S. / °C
Material	Head		SUS	Front: SUS Rear: Aluminium
	Optical unit		Polycarbonate
Weight	Head		Approx. 140 g	Approx. 180 g	Approx. 200 g	Approx. 280 g	Approx. 380 g
	Optical unit		Approx. 1600 g
^1 Sensor head and optical unit are a matched pair. Not cross compatible. ^2 Value measured in displacement mode with KEYENCE reference workpiece (mirrored surface).

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Model				CL-S015G^*1	CL-S015EXG^*1	CL-V020G^*1	CL-V050G^*1	CL-PT010G^*1
Image
Type				Optical unit
Head				CL-S015 ^*1	CL-S015EX ^*1	CL-V020 ^*1	CL-V050 ^*1	CL-PT010 ^*1
Reference distance				15 mm		20 mm	50 mm	10 mm
Reference measurement range	Measurement range			± 1.0 mm		± 1.3 mm	± 4 mm	± 0.3 mm
	Linearity			± 0.2 µm^*2		± 0.3 µm^*2	± 1.25 µm^*2	± 0.11 µm ^*2
High precision measurement range	Measurement range			− 0.2 mm/− 1.0 mm		± 0.5 mm	± 1.6 mm	± 0.15 mm
	Linearity			± 0.1 µm ^*2		± 0.23 µm ^*2	± 1.15 µm ^*2	± 0.09 µm ^*2
Resolution				0.003 µm^*3		0.01 µm^*3	0.03 µm^*3	0.001 µm^*3
Spot diameter				ø 10 µm		ø 20 µm	ø 40 µm	ø 3.5 µm
Laser class	Optical unit			Class 1
Sampling cycle				100/200/500/1000 µs (Adjustable 4-stage)
Environmental resistance	Enclosure rating	Head		IP50		IP40 degassed structure for vacuum environments ^*5		IP64 (IEC60529)
	Ambient light			Target surface illuminance 30,000 lux (Incandescent lamp)
	Operating ambient temperature	Head		− 20 to 70°C		− 20 to 200°C		0 to 50°C
		Optical unit		0 to 50°C
	Relative humidity			85% RH or less (no condensation)
	Vibration resistance	Head		10 to 57 Hz, double amplitude 1.5 mm; 2 hours each for X, Y, and Z axes				10 to 57 Hz, double amplitude 0.45 mm; 2 hours each for X, Y,and Z axes
		Optical unit		10 to 57 Hz, double amplitude 0.3 mm; 2 hours each for X, Y, and Z axes
	Shock resistance			15G 6 ms
	Vacuum			Vacuum environments		Ultra-high-vacuum environments ^*6		None
	Explosion-proof rating	Explosion-proof performance	Head	None	IECEx: Ex op is IIC T6 Ga ATEX: II 1 G Ex op is IIC T6 Ga NRTL/ACO: Class I, Zone 0, AEx op is IIC T6 Ga Class I, Division 1, Groups A, B, C, D, T6	None
			Optical unit		IECEx: Ex op is ⅡC T6 Ga ATEX: II (1) G [Ex op is ⅡC T6 Ga] NRTL/ACO: Class I, Zone 0, [AEx op is ⅡC T6 Ga] Class I, Division 1, Groups A, B, C, D, T6
		Zone/Division	Head		IECEx: Zone 0 ATEX: Zone 0 NRTL/ACO: Zone 0/Division 1
			Optical unit		Do not install in a hazardous location (associated equipment)
		Ambient temperature	Head		− 20℃ ≤ Ta ≤ 70℃
			Optical unit		0℃ ≤ Ta ≤ 50℃
		Certification number			IECEx: IECEx CSAE 23.0033X ATEX: CSANe 23ATEX1133X NRTL/ACO: 23CA80171819X
Temperature characteristic	Head			0.005% of F.S. / °C ^*4		0.013% of F.S. / °C ^*4	0.015% of F.S. / °C ^*4	0.1% of F.S. / °C ^*4
	Optical unit			0.015% of F.S. / °C
Material	Head			SUS303/304		SUS304		Front: SUS Rear: Aluminium
	Optical unit			Polycarbonate
Weight	Head			Approx. 350 g		Approx. 100 g		Approx. 1100 g
	Optical unit			Approx. 1600 g
^1 Sensor head and optical unit are a matched pair. Not cross compatible. ^2 Value measured in displacement mode with KEYENCE reference workpiece (mirrored surface). ^3 Value measured using 16,384 average cycles with KEYENCE reference workpiece (mirrored surface). ^4 These figures are based on the case where a jig made of SUS303 (or SUS304) is fixed between the head and the object. ^5 The enclosure rating is equivalent to IP50 when the included sticker is attached. ^6 Operation verification has been performed in environments of 10^-6 Pa.

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Model				CL-S015N^*1	CL-S015EXN^*1	CL-V020N^*1	CL-V050N^*1	CL-PT010N^*1
Image
Type				Optical unit
Head				CL-S015 ^*1	CL-S015EX ^*1	CL-V020 ^*1	CL-V050 ^*1	CL-PT010 ^*1
Reference distance				15 mm		20 mm	50 mm	10 mm
Reference measurement range	Measurement range			± 1.0 mm		± 1.3 mm	± 4 mm	± 0.3 mm
	Linearity			± 0.35 µm^*2		± 0.45 µm^*2	± 1.4 µm^*2	± 0.22 µm^*2
High precision measurement range	Measurement range			− 0.2 mm/− 1.0 mm		± 0.5 mm	± 1.6 mm	± 0.15 mm
	Linearity			± 0.25 µm ^*2		± 0.38 µm ^*2	± 1.3 µm ^*2	± 0.2 µm ^*2
Resolution				0.25 µm^*3
Spot diameter				ø 10 µm		ø 20 µm	ø 40 µm	ø 3.5 µm
Laser class	Optical unit			Class 1
Sampling cycle				100/200/500/1000 µs (Adjustable 4-stage)
Environmental resistance	Enclosure rating	Head		IP50		IP40 degassed structure for vacuum environments ^*5		IP64 (IEC60529)
	Ambient light			Target surface illuminance 30,000 lux (Incandescent lamp)
	Operating ambient temperature	Head		− 20 to 70°C		− 20 to 200°C		0 to 50°C
		Optical unit		0 to 50°C
	Relative humidity			85% RH or less (no condensation)
	Vibration resistance	Head		10 to 57 Hz, double amplitude 1.5 mm; 2 hours each for X, Y, and Z axes				10 to 57 Hz, double amplitude 0.45 mm; 2 hours each for X, Y, and Z axes
		Optical unit		10 to 57 Hz, double amplitude 0.3 mm; 2 hours each for X, Y, and Z axes
	Shock resistance			15G 6 ms
	Vacuum			Vacuum environments		Ultra-high-vacuum environments ^*6		None
	Explosion-proof rating	Explosion-proof performance	Head	None	IECEx: Ex op is IIC T6 Ga ATEX: II 1 G Ex op is IIC T6 Ga NRTL/ACO: Class I, Zone 0, AEx op is IIC T6 Ga Class I, Division 1, Groups A, B, C, D, T6	None
			Optical unit		IECEx: [Ex op is ⅡC T6 Ga] ATEX: II (1) G [Ex op is ⅡC T6 Ga] NRTL/ACO: Class I, Zone 0, [AEx op is ⅡC T6 Ga] Class I, Division 1, Groups A, B, C, D, T6
		Zone/Division	Head		IECEx: Zone 0 ATEX: Zone 0 NRTL/ACO: Zone 0/Division 1
			Optical unit		Do not install in a hazardous location (associated equipment)
		Ambient temperature	Head		− 20℃ ≤ Ta ≤ 70℃
			Optical unit		0℃ ≤ Ta ≤ 50℃
		Certification number			IECEx: IECEx CSAE 23.0033X ATEX: CSANe 23ATEX1133X NRTL/ACO: 23CA80171819X
Temperature characteristic	Head			0.005% of F.S. / °C ^*4		0.013% of F.S. / °C ^*4	0.015% of F.S. / °C ^*4	0.1% of F.S. / °C ^*4
	Optical unit			0.015% of F.S. / °C
Material	Head			SUS303/304		SUS304		Front: SUS Rear: Aluminium
	Optical unit			Polycarbonate
Weight	Head			Approx. 350 g		Approx. 100 g		Approx. 1100 g
	Optical unit			Approx. 1600 g
^1 Sensor head and optical unit are a matched pair. Not cross compatible. ^2 Value measured in displacement mode with KEYENCE reference workpiece (mirrored surface). ^3 Value measured using 16,384 average cycles with KEYENCE reference workpiece (mirrored surface). ^4 These figures are based on the case where a jig made of SUS303 (or SUS304) is fixed between the head and the object. ^5 The enclosure rating is equivalent to IP50 when the included sticker is attached. ^6 Operation verification has been performed in environments of 10^-6 Pa.

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Specs Confocal Displacement Sensor CL-3000 series

Optical Units and Sensor Heads - Quad type (Export Control Product)

Optical Units and Sensor Heads - Focused spot type (Export Control Product)

Optical Units and Sensor Heads - Quad type

Optical Units and Sensor Heads - Focused spot type